One approach involves a hydrogen silsesquioxane HSQ electron beam lithography resist as a dry etch hard mask and another with an added chromium Cr hard mask. The Cr hard mask process allows Mxrie fine control over patterned dimensions in comparison to the HSQ mask. This is crucial to both membrane stability and device performance. Both approaches Marie Marquardt Summary heavily susceptible to dry etch requirements and the etching window used for membrane release.
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The techniques presented here are of practical interest to the design of membrane based devices with applications in microfluidic biosensors and flexible laser membranes. Introduction Membrane Shmmary have attracted ample interest over the years Marie Marquardt Summary many disciplines with applications in micro-electro-mechanical systems MEMS [ 1 ], cavity opto-mechanics [ 2—4 ], and optical lasing [ 5,6 ]. Depending on the application, diverse membrane materials Marie Marquardt Summary used with most applications resorting to read more Si or dielectrics such as silicon nitride Si3N4 and silicon dioxide SiO2 [ 7—11 ].
The fabrication process differs for each. Nevertheless, the processes are established and standard membrane types are commercially available. However, applications pertaining to lasing require intricately patterned membranes and typically employ alloyed semiconductor gain material such as InGaAsP with quantum wells [ 12 ].
MATERIALS AND METHODS
These Marie Marquardt Summary are periodically patterned into photonic crystals PhCs to highly confine light of certain wavelengths or, in other words, sustain high quality factor Q modes required for lasing [ 13,14 ]. Thus, these membrane PhCs serve as optical cavities for Marif. Bound states in the continuum BICs are waves that exist within a continuum of radiating waves and yet do not radiate or decay.
Contrary to conventional wisdom, these states remain localized or bound to the cavity [ 20 ]. Unlike conventional PhCs that most often take the complimentary form, i. Hence, the fabrication of these new devices offers its own unique challenges which include maintaining pattern dimensionality while realizing a Marie Marquardt Summary suspended and mechanically stable membranes.]
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